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Journal of Micro-Nanolithography MEMS and MOEMS


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*Average Peer Review
Slow, 6-12 Week(s)
*Competitiveness
Easy
CiteScore
3.4

CiteScore Rank
Subject Area Rank Percentile
Category: Engineering
Subcategory: Mechanical Engineering
299 / 672
Category: Engineering
Subcategory: Electrical and Electronic Engineering
389 / 797
Category: Engineering
Subcategory: Atomic and Molecular Physics, and Optics
113 / 224
Category: Engineering
Subcategory: Condensed Matter Physics
223 / 434
Category: Engineering
Subcategory: Electronic, Optical and Magnetic Materials
155 / 284


Indexing (SCI collection)

Country/Area of Publication
UNITED STATES
Publication Frequency
Quarterly
Publisher
SPIE

ISSN
1932-5150
E-ISSN
1932-5134
Year Publication Started
2007

Self-citation (2023-2024)
N/A
Annual Article Volume
0
Gold OA Percentage
7.69%


Open Access Info
APC APC Waiver Other Charges
N/A N/A N/A

Journal Aim & Scope
The Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3) publishes peer-reviewed papers on the science, development, and practice of lithographic, fabrication, packaging, and integration technologies necessary to address the needs of the electronics, microelectromechanical systems, micro-optoelectromechanical systems, and photonics industries.


Web of Science Quartiles
N/A
*Crowdsourced data
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  • Journal of Micro-Nanolithography MEMS and MOEMS Journal of Micro-Nanolithography MEMS and MOEMS
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